@article{UBHD-68175371,
  author={Nold, Michael and Kleditzsch, Stefan and Riedel, Uwe},
  title={Modelling inductively coupled plasmas},
  subtitle={a sensitivity study on plasma chemistry and surface chemistry},
  year={2001},
  pages={531-535},
  language={eng},
  issn={1879-3347},
  volume={142},
  note={Gesehen am 04.10.2017},
  journal={Surface and coatings technology},
  doi={10.1016/S0257-8972(01)01054-4},
}