@article{UBHD-68175371, author={Nold, Michael and Kleditzsch, Stefan and Riedel, Uwe}, title={Modelling inductively coupled plasmas}, subtitle={a sensitivity study on plasma chemistry and surface chemistry}, year={2001}, pages={531-535}, language={eng}, issn={1879-3347}, volume={142}, note={Gesehen am 04.10.2017}, journal={Surface and coatings technology}, doi={10.1016/S0257-8972(01)01054-4}, }