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Speichern
TY - `EDBOOK` A2 - Dearnaley, Geoffrey TI - Ion implantation PB - North-Holland CY - Amsterdam [u.a.] PY - 1973 LA - eng SP - XV, 802 S T2 - Defects in crystalline solids M1 - 8 N1 - Includes bibliographical references and index SN - 0-7204-1758-9 SN - 0-444-10488-7 SN - 978-0-7204-1758-6 SN - 978-0-444-10488-5 KW - Ionenimplantation CN - PY/UQ 2400 D285 AN - UBHD-1041071 ER -
