Localization microscopy (SPDM) facilitates high precision control of lithographically produced nanostructures

• Verfasst von: Grab, Anna Luise [VerfasserIn]
• Verfasst von: Hagmann, M. [VerfasserIn]
• Verfasst von: Dahint, Reiner [VerfasserIn]
• Verfasst von: Cremer, Christoph [VerfasserIn]
• Titel: Localization microscopy (SPDM) facilitates high precision control of lithographically produced nanostructures
• Verf.angabe: A.L. Grab, M. Hagmann, R. Dahint, C. Cremer
• Jahr: 2015
• Jahr des Originals: 2014
• Umfang: 7 S.
• Fussnoten: Available online 20 August 2014 ; Gesehen am 14.09.2020
• Titel Quelle: Enthalten in: Micron
• Ort Quelle: New York, NY [u.a.] : Elsevier, 1969
• Jahr Quelle: 2015
• Band/Heft Quelle: 68(2015), Seite 1-7
• ISSN Quelle: 1878-4291
• DOI: doi:10.1016/j.micron.2014.08.003
• Datenträger: Online-Ressource
• Sprache: eng
• Sach-SW: Calibration
• Sach-SW: Localization microscopy
• Sach-SW: Spectral precision distance microscopy (SPDM)
• K10plus-PPN: 1731780710

Abstract

Nanoscale resolution in material sciences is usually restricted to scanning electron beam microscopes. Here we present a procedure that allows single molecule resolution of the sample surface with visible light. Highlighting the performance we used electron beam lithography to generate highly regular nanostructures consisting of interconnected cubes. The samples were labeled with Alexa 647 dyes. The spatial organization of the dyes on nanostructured surfaces was localized with single molecule resolution using localization microscopy. This succeeded also in an absolute spatial calibration of the localization method applied (spectral precision distance microscopy/SPDM). The findings will contribute to the field of product control for industrial applications and long-term fluorescence imaging.