| |  Online-Ressource |
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| Verfasst von: | Lehr, Dennis [VerfasserIn]  |
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| | Helgert, Michael [VerfasserIn] |
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| | Sundermann, Michael [VerfasserIn] |
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| | Morhard, Christoph [VerfasserIn] |
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| | Pacholski, Claudia [VerfasserIn] |
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| | Spatz, Joachim P. [VerfasserIn] |
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| | Brunner, Robert [VerfasserIn] |
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| Titel: | Simulating different manufactured antireflective sub-wavelength structures considering the influence of local topographic variations |
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| Verf.angabe: | Dennis Lehr, Michael Helgert, Michael Sundermann, Christoph Morhard, Claudia Pacholski, Joachim P. Spatz, and Robert Brunner |
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| E-Jahr: | 2010 |
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| Jahr: | 29 Oct 2010 |
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| Umfang: | 13 S. |
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| Fussnoten: | Gesehen am 13.03.2023 |
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| Titel Quelle: | Enthalten in: Optics express |
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| Ort Quelle: | Washington, DC : Optica, 1997 |
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| Jahr Quelle: | 2010 |
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| Band/Heft Quelle: | 18(2010), 23 vom: Okt., Seite 23878-23890 |
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| ISSN Quelle: | 1094-4087 |
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| Abstract: | Laterally structured antireflective sub-wavelength structures show unique properties with respect to broadband performance, damage threshold and thermal stability. Thus they are superior to classical layer based antireflective coatings for a number of applications. Dependent on the selected fabrication technology the local topography of the periodic structure may deviate from the perfect repetition of a sub-wavelength unit cell. We used rigorous coupled-wave analysis (RCWA) to simulate the efficiency losses due to scattering effects based on height and displacement variations between the individual protuberances. In these simulations we chose conical and Super-Gaussian shapes to approximate the real profile of structures fabricated in fused silica. The simulation results are in accordance with the experimentally determined optical properties of sub-wavelength structures over a broad wavelength range. Especially the transmittance reduction in the deep-UV could be ascribed to these variations in the sub-wavelength structures. |
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| DOI: | doi:10.1364/OE.18.023878 |
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| URL: | Bitte beachten Sie: Dies ist ein Bibliographieeintrag. Ein Volltextzugriff für Mitglieder der Universität besteht hier nur, falls für die entsprechende Zeitschrift/den entsprechenden Sammelband ein Abonnement besteht oder es sich um einen OpenAccess-Titel handelt.
Volltext: https://doi.org/10.1364/OE.18.023878 |
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| | Volltext: https://opg.optica.org/oe/abstract.cfm?uri=oe-18-23-23878 |
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| | DOI: https://doi.org/10.1364/OE.18.023878 |
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| Datenträger: | Online-Ressource |
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| Sprache: | eng |
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| Sach-SW: | Antireflection coatings |
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| | Damage |
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| | Optical properties |
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| | Spatial frequency |
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| | Subwavelength structures |
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| | Thin films |
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| K10plus-PPN: | 1839001410 |
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| Verknüpfungen: | → Zeitschrift |
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Simulating different manufactured antireflective sub-wavelength structures considering the influence of local topographic variations / Lehr, Dennis [VerfasserIn]; 29 Oct 2010 (Online-Ressource)
