Multimode photoacoustic method for the evaluation of mechanical properties of heteroepitaxial diamond layers

• Verfasst von: Shen, Zhonghua H. [VerfasserIn]
• Verfasst von: Lomonosov, Alexey M. [VerfasserIn]
• Verfasst von: Hess, Peter [VerfasserIn]
• Verfasst von: Fischer, Martin [VerfasserIn]
• Verfasst von: Gsell, Stefan [VerfasserIn]
• Verfasst von: Schreck, Matthias [VerfasserIn]
• Titel: Multimode photoacoustic method for the evaluation of mechanical properties of heteroepitaxial diamond layers
• Verf.angabe: Zhonghua H. Shen, Alexey M. Lomonosov, Peter Hess, Martin Fischer, Stefan Gsell, and Matthias Schreck
• E-Jahr: 2010
• Jahr: 26 October 2010
• Umfang: 6 S.
• Fussnoten: Gesehen am 10.07.2023
• Titel Quelle: Enthalten in: Journal of applied physics
• Ort Quelle: Melville, NY : American Inst. of Physics, 1931
• Jahr Quelle: 2010
• Band/Heft Quelle: 108(2010), 8, Artikel-ID 083524, Seite 1-6
• ISSN Quelle: 1089-7550
• DOI: doi:10.1063/1.3493245
• Datenträger: Online-Ressource
• Sprache: eng
• K10plus-PPN: 1852295988

Abstract

A multimode photoacoustic method was developed for evaluating acoustically thick anisotropic layers, using surface acoustic waves. Such layers support multiple acoustic modes. This complicates the reverse problem, but on the other hand, makes it possible to extract more materials properties. Several mechanical properties of a layer-substrate system, consisting of a 110 μm thick heteroepitaxial chemical vapor deposited diamond layer on Ir/YSZ (yttria-stabilized zirconia)/Si(001), were evaluated, based on two surface acoustic modes. A dispersive and a nondispersive mode measured in two different crystallographic directions were employed to evaluate the three elastic stiffness coefficients C11, C12, C44, and the mass density of the diamond layer. It is demonstrated that accurate elastic moduli can be determined without special sample preparation, employing the layered system as obtained from the heteroepitaxial diamond growth process.