@book{UBHD-1041071, editor={Dearnaley, Geoffrey [Mitarb.]}, title={Ion implantation}, publisher={North-Holland}, address={Amsterdam [u.a.]}, year={1973}, pages={XV, 802 S}, language={eng}, isbn={0-7204-1758-9 and 0-444-10488-7 and 978-0-7204-1758-6 and 978-0-444-10488-5}, number={ARRAY(0x55ee34a97fe8)}, series={Defects in crystalline solids}, note={Includes bibliographical references and index}, keywords={Ionenimplantation}, library={PY [Signatur: PY/UQ 2400 D285]}, }