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| |  Online-Ressource |
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| Verfasst von: | Rebohle, Lars [VerfasserIn]  |
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| | Prucnal, Slawomir [VerfasserIn] |
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| | Reichel, Denise [VerfasserIn] |
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| Titel: | Flash Lamp Annealing |
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| Titelzusatz: | from Basics to Applications |
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| Verf.angabe: | Lars Rebohle, Slawomir Prucnal, Denise Reichel |
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| Verlagsort: | Cham |
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| Verlag: | Springer |
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| E-Jahr: | 2019 |
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| Jahr: | [2019] |
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| Umfang: | 1 Online-Ressource (XVIII, 288 Seiten) |
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| Gesamttitel/Reihe: | Springer Series in Materials Science ; volume 288 |
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| | Springer eBooks : Physics and Astronomy |
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| ISBN: | 978-3-030-23299-3 |
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| Abstract: | Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook |
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| | This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users |
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| DOI: | doi:10.1007/978-3-030-23299-3 |
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| URL: | Resolving-System: https://doi.org/10.1007/978-3-030-23299-3 |
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| | Cover: https://swbplus.bsz-bw.de/bsz1671010892cov.jpg |
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| | DOI: https://doi.org/10.1007/978-3-030-23299-3 |
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| Datenträger: | Online-Ressource |
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| Sprache: | eng |
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| Bibliogr. Hinweis: | Erscheint auch als : Druck-Ausgabe |
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| | Erscheint auch als : Druck-Ausgabe: Rebohle, Lars, 1970 - : Flash lamp annealing. - Cham, Switzerland : Springer, 2019. - xviii, 288 Seiten |
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| RVK-Notation: | ZM 7680 |
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| K10plus-PPN: | 1671010892 |
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| Verknüpfungen: | → Übergeordnete Aufnahme |
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| Lokale URL UB: |  Zum Volltext |
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978-3-030-23299-3
Flash Lamp Annealing / Rebohle, Lars [VerfasserIn]; [2019] (Online-Ressource)
68418895
